ࡱ> OQNg RR*bjbjVVw:r<r< i hhh$Pd@8\rTr,7777777$;=89h\2"T\\8>8P#P#P#\8h3P#\7P#P#%P&0C !4%2T808%,X>>!X>&&X>h3( vTP#DD   88!x   8\\\\X>         , : )R(uNO)nGaNceQB\cGSAlGaN/InAlN/AlN/GaN~g-N2DEGy'`( Y=NZ1 sSfN1,2 1 -NVyf[bJS[SOxvz@bPgeyf[͑p[[ SN100083 (2-NVyf[bJS[SOxvz@b-[N'Yf[Oo`RPgeNhVNTT[[ SN100083) Xd,geǏuAlGaN/InAlN/AlN/GaN~g xvzNGS)nǏ z[~gvhbb_T2DEGy'`(vq_T0[hf 1uNAlGaNvSTgSTInAlNvvfSO(ϑvS ~g-N2DEGvSm^Tysf>fMNO0NO)nGaNceQB\Y gHeInAlN(Wؚ)n Nv~g(ϑS N Ycؚ2DEGSm^Tys0 \KmՋhf AlGaN/InAlN/AlN/GaN~g(W855!k3z[0FO/f S_)n^ۏNekGSؚe InAlNvvfSO(ϑS NSMQ0 sQ.͋ HEMT GaN 2DEG y'`( -NVR{|STN366 e.shƋx ezS A low temperature GaN spacer to improve the transport properties of two-dimensional electron gas in AlGaN/InAlN/AlN/GaN heterostructures Lijuan Jiang1, Xiaoliang Wang1,2 (1 Key Laboratory of Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China) (2ISCAS-XJTU Joint Laboratory of Functional Materials and Devices for Informatics, Beijing, 10083, China) Abstract: We fabricate a heterostructure composed of AlGaN/InAlN/AlN/GaN structure, and the influence of LT-to-HT growth processes on the surface morphology and 2DEG transport properties of the heterostructures was investigated. The two-dimensional electron gas density and mobility in heterostructure with high temperature AlGaN were deteriorated which is attributed to the reverse polarization field of AlGaN and the degradation of InAlN structural quality and surface morphology. A low temperature GaN spacer was inserted to reduce the risk of InAlN degradation thus increase the 2DEG density and mobility. Hall measurements indicate that the heterostructure is relatively stable at 855 !. However, with further increasing the temperature, a sharp degradation of InAlN quality is  HYPERLINK "app:ds:unavoidable" \t "" unavoidable. Key words: HEMT, GaN, 2DEG, transport properties EEACC: 2530C 1 _ GaN ؚysvfSO{(HEMT)(Wؚ0'YRsebS_N_'Yۏek ]~S0R^lsQl[1-3]0яt^eg YN\ՋNNev~gegۏNekcGSHEMTv'`0YLeeI{NǏ5B\InGaN/GaNYϑP[1~g\O:ǸRWegcؚ[N~5uP[l2DEG vP6RR S_N111mS/mmv[0Ndk Te NGaNvf &(gd(K$a$gdz$e7$8$H$XD2]ea$gd $da$gd1Ggdgd=$a$gd$a$gd $a$gd_~ $dha$gd$a$gd=   ^ p $ . 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H I #$#3arfͿ~t~~h7CJKHaJh7CJKHaJo(h(Kh(KCJKHaJo(h(Kh(KCJKHaJh(KCJKHaJo(hnZ h5CJKHaJo(hnZ h5CJKHaJhhCJKHaJo(hth CJaJo(hth CJaJhth CJH*aJo((  "$&(<>FT\`Ⱥ{m]PD:hlh5o(h7h(KCJaJo(hP+5CJKHaJo(h)h5CJKHaJo(h(Kh(KCJKHaJo(hC]CJKHaJo(hCJKHaJo(h(KCJKHaJo(h\hCJKHaJo(hnZ h5CJKHaJo(h(Kh(KCJKHaJo(h(Kh(KCJaJo(h(Kh(KCJKHaJh7h7CJKHaJ!jh7h7CJKHUaJz%%&'`)b)d)h)j)n)p)t)v)z)|)**** &dPgdgdQ^gdO+gd1$9D[$\$a$gdM8gd4ESdgdgdkq $d%l%z%%%%%%%󰚈v[A2h*.hlW5CJKHOJQJ\^JaJmHsH5h*.hE5CJKHOJQJ\^JaJmHo(sH"hh(5CJOJQJaJo("hhA/5CJOJQJaJo(*hhv5CJOJQJaJmHo(sH*hh5CJOJQJaJmHo(sHhhoCJaJo(Uh CJH*aJo(hlWh!)CJH*aJo(h^.CJaJo(h!)h!)CJaJo(Al(Ga)Nvu)n^kInGaNbInAlNؚ0Vdk(WۏLPgeue_{~SN*NNNO)n0Rؚ)nvǏ z ؚ)nuO[NO)nB\Nu'Yq_T $\vQ/f[NN*NRWvHEMT~geg ُ*NǏ zO[2DEGvy'`(Nu_'Yq_T0,geǏuAlGaN/InAlN/AlN/GaN~gegxvz~g-N2DEGvy'`( v^NO)nGaNceQB\egؚ)nu[2DEGy'`(vbq_T0 Se.s: [1] Mizutani T, Ito M, Kishimoto S, et al. AlGaN/GaN HEMTs With Thin InGaN Cap Layer for Normally Off Operation [J]. IEEE Electron Device Lett., 2007, 28: 549. [2] Yanagihara M, Uemoto Y, Ueda T, et al. Recent advances in GaN transistors for future emerging applications [J]. Phys. Status Solidi A, 2009,206: 1221. [3] Raymond S P, Simon M W, James W M, et al. A Review of GaN on SiC High Electron-Mobility Power Transistors and MMICs [J]. IEEE Trans. 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